Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Image-based digital control of plasma processing

Image-based digital control of plasma processing

US Patent 12027426 · Granted Jul 2, 2024

Estimated economic value: $85,126,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma source for semiconductor processing2025
Addressable plasma delivery methods and devices2025
Plasma sources and plasma processing apparatus thereof2025
Film thickness uniformity improvement using edge ring and bias electrode geometr2025
Uniformity control for plasma processing2025
Digital control of plasma processing2024
Edge ring2024
Plasma processing with independent temperature control2023
Plasma sources and plasma processing apparatus thereof2023
Film thickness uniformity improvement using edge ring and bias electrode geometr2022
Plasma strip tool with uniformity control2021
Thin film treatment process2021