Film thickness uniformity improvement using edge ring and bias electrode geometry

Assignee

• Applied Materials

Inventors

• Kin Pong Lo (24 patents)
• Vladimir Nagorny (20 patents)
• Wei Liu (64 patents)
• Theresa Kramer Guarini (25 patents)
• Bernard L. Hwang (18 patents)
• Malcolm J. Bevan (48 patents)
• Jacob Abraham (8 patents)
• Swayambhu Prasad Behera (7 patents)

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