Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7456101 | Method for enhancing the nucleation and morphology of ruthenium films on dielectric substrates using amine containing compounds | Sanjay Gopinath, Jeremie J. Dalton, John Drewery, Willibrordus Gerardus Maria van den Hoek | 2008-11-25 |
| 7279417 | Use of metallocenes to inhibit copper oxidation during semiconductor processing | Jeremie J. Dalton, Sanjay Gopinath | 2007-10-09 |
| 7217398 | Deposition reactor with precursor recycle | Jeremie J. Dalton | 2007-05-15 |
| 7211509 | Method for enhancing the nucleation and morphology of ruthenium films on dielectric substrates using amine containing compounds | Sanjay Gopinath, Jeremie J. Dalton, John Drewery, Willibrordus Gerardus Maria van den Hoek | 2007-05-01 |
| 7041596 | Surface treatment using iodine plasma to improve metal deposition | Jeremie J. Dalton, Sanjay Gopinath, John Drewery | 2006-05-09 |
| 6992018 | Chemical fluid deposition for the formation of metal and metal alloy films on patterned and unpatterned substrates | James J. Watkins, David Long, Jason L. Lazorcik | 2006-01-31 |
| 6984584 | Contamination suppression in chemical fluid deposition | Albertina Cabanas, James J. Watkins | 2006-01-10 |
| 6884737 | Method and apparatus for precursor delivery utilizing the melting point depression of solid deposition precursors in the presence of supercritical fluids | Jeremie J. Dalton | 2005-04-26 |
| 6689700 | Chemical fluid deposition method for the formation of metal and metal alloy films on patterned and unpatterned substrates | James J. Watkins, David Long, Jason L. Lazorcik | 2004-02-10 |