Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6277250 | Dual cathode arrangement for physical vapor deposition of materials onto a round substrate with high aspect ratio features | Derrek Andrew Russell | 2001-08-21 |
| 6254745 | Ionized physical vapor deposition method and apparatus with magnetic bucket and concentric plasma and material source | — | 2001-07-03 |