Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651999 | Method and apparatus for plasma dicing a semi-conductor wafer | Russell Westerman | 2023-05-16 |
| 10818552 | Method and apparatus for plasma dicing a semi-conductor wafer | Russell Westerman | 2020-10-27 |
| 10269641 | Method and apparatus for plasma dicing a semi-conductor wafer | Russell Westerman | 2019-04-23 |