Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10008369 | Cyclical plasma etching | Andrew L. Goodyear | 2018-06-26 |
| 9793149 | Electrostatic clamping method and apparatus | Yiping Song, Joao Ferreira | 2017-10-17 |
| 9412566 | Methods and apparatus for depositing and/or etching material on a substrate | Mark McNie, Leslie Michael Lea | 2016-08-09 |
| 7713377 | Apparatus and method for plasma treating a substrate | Geoffrey Hassall | 2010-05-11 |
| 5183402 | Workpiece support | Arthur John McGeown | 1993-02-02 |
| 4488506 | Metallization plant | Rudolf A. H. Heinecke, Ronald C. Stern | 1984-12-18 |
| 4475931 | Gas cleaning | Roland Clift, Mojtaba Ghadiri | 1984-10-09 |