Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10930470 | Pulsed, bidirectional radio frequency source/load | Aaron T. Radomski, Ky Thoai Luu, Larry J. Fisk, II, Ross REINHARDT, Matthew G. Harrington +2 more | 2021-02-23 |
| 10741363 | Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matching | Aaron Michael Burry, Aaron T. Radomski, Aung Toe | 2020-08-11 |
| 10607821 | Sputtering system and method including an arc detection | David C. Halstead, Michael R. Gilbert | 2020-03-31 |
| 10546724 | Pulsed, bidirectional radio frequency source/load | Aaron T. Radomski, Ky Thoai Luu, Larry J. Fisk, II, Ross REINHARDT, Matthew G. Harrington +2 more | 2020-01-28 |
| 9613784 | Sputtering system and method including an arc detection | David C. Halstead, Michael R. Gilbert | 2017-04-04 |
| 9316675 | Secondary plasma detection systems and methods | Richard Pham | 2016-04-19 |
| 7336511 | Power supply control loop with multiple leveling modes | Sean O. Harnett, Mark D. Tracy | 2008-02-26 |
| 7206210 | Power supply control loop with multiple leveling modes | Sean O. Harnett, Mark D. Tracy | 2007-04-17 |
| 6995545 | Control system for a sputtering system | Mark D. Tracy | 2006-02-07 |