Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049857 | Adaptive periodic waveform controller | Larry J. Fisk, II, Jonathan Smyka | 2018-08-14 |
| 9947514 | Plasma RF bias cancellation system | Sang Won Lee, Larry J. Fisk, II, Jonathan Smyka | 2018-04-17 |
| 9214909 | High reliability RF generator architecture | Jonathan Smyka, Daniel J. Lincoln, Yogendra K. Chawla, David J. Coumou, Vadim Lubomirsky | 2015-12-15 |
| 9136093 | Synchronization of RF pulsing with RF metrology, processing, and control | David J. Coumou, Larry J. Fisk, II, Jaehyun Kim, Sang Won Lee, Jonathan Smyka | 2015-09-15 |
| 9041480 | Virtual RF sensor | Dennis M. Brown, Nicholas Nelson | 2015-05-26 |
| 9011633 | Broadband techniques to reduce the effects of impedance mismatch in plasma chambers | Scott R. Bullock, Brent Irvine | 2015-04-21 |
| 8890537 | Harmonic derived arc detector | John C. Valcore, Jr., Yufeng Han, Jonathan Smyka, Salvatore Polizzo | 2014-11-18 |
| 8736377 | RF pulse edge shaping | Amish Rughoonundon, Larry J. Fisk, II | 2014-05-27 |
| 8040068 | Radio frequency power control system | David J. Coumou, Paul Eyerman, Carl Ioriatti, William Stenglein, Larry J. Fisk, II +1 more | 2011-10-18 |
| 7728602 | Harmonic derived arc detector | John C. Valcore, Jr., Yufeng Han, Jonathan Smyka, Salvatore Polizzo | 2010-06-01 |
| 6868310 | Predictive failure scheme for industrial thin films processing power delivery system | Kevin P. Nasman | 2005-03-15 |
| 6778921 | Modular architecture for industrial power delivery system | Anthony R. A. Keane, William R. Pulhamus, Jr. | 2004-08-17 |
| 6750711 | RF power amplifier stability | Yogendra K. Chawla, Craig A. Covert | 2004-06-15 |
| 6700092 | Pulsing intelligent RF modulation controller | Daniel J. Vona, Jr., Kevin P. Nasman, William R. Pulhamus, Jr. | 2004-03-02 |
| 6459067 | Pulsing intelligent RF modulation controller | Daniel J. Vona, Jr., Kevin P. Nasman, William R. Pulhamus, Jr. | 2002-10-01 |
| 6417732 | Controller for RF power generator with reduced cable length sensitivity | Kevin P. Nasman | 2002-07-09 |