Issued Patents All Time
Showing 26–50 of 128 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069553 | Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity | Alexander Matyushkin, Harmeet Singh, Alexei Marakhtanov, Keith Gaff, Zhigang Chen +1 more | 2021-07-20 |
| 11024532 | Electrostatic chuck design for cooling-gas light-up prevention | Alexander Matyushkin, Alexei Marakhtanov, Keith Gaff, Felix Kozakevich | 2021-06-01 |
| 10916409 | Active control of radial etch uniformity | Alexei Marakhtanov, Felix Kozakevich, Bing Ji, Kenneth Lucchesi | 2021-02-09 |
| 10861708 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Ranadeep Bhowmick, Eric A. Hudson, Felix Kozakevich +2 more | 2020-12-08 |
| 10825661 | Systems for cooling RF heated chamber components | Jon McChesney, Saravanapriyan Sriraman, Richard A. Marsh, Alexander Paterson | 2020-11-03 |
| 10825656 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Michael C. Kellogg, Alexei Marakhtanov, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2020-11-03 |
| 10755895 | Ion energy control by RF pulse shape | Alexei Marakhtanov, Zhigang Chen | 2020-08-25 |
| 10665435 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2020-05-26 |
| 10615003 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Michael C. Kellogg, Alexei Marakhtanov, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2020-04-07 |
| 10504744 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Ranadeep Bhowmick, Eric A. Hudson, Felix Kozakevich +2 more | 2019-12-10 |
| 10395902 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2019-08-27 |
| 10340122 | Systems and methods for tailoring ion energy distribution function by odd harmonic mixing | Zhigang Chen, Alexei Marakhtanov | 2019-07-02 |
| 10304662 | Multi regime plasma wafer processing to increase directionality of ions | Alexei Marakhtanov, Lin Zhao, Felix Kozakevich, Kenneth Lucchesi, Zhigang Chen | 2019-05-28 |
| 10283330 | Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators | Alexei Marakhtanov, Felix Kozakevich, Michael C. Kellogg, Zhigang Chen, Kenneth Lucchesi +1 more | 2019-05-07 |
| 10257887 | Substrate support assembly | Alexander Matyushkin, Dan Katz, Theodoros Panagopoulos, Michael D. Willwerth | 2019-04-09 |
| RE47275 | Substrate support providing gap height and planarization adjustment in plasma processing chamber | Jerrell K. ANTOLIK, Yen-Kun Wang | 2019-03-05 |
| 10115568 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Michael C. Kellogg, Alexei Marakhtanov, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2018-10-30 |
| 10115564 | Uniformity control circuit for use within an impedance matching circuit | Alexei Marakhtanov, Felix Kozakevich, Kenneth Lucchesi | 2018-10-30 |
| 10083853 | Electrostatic chuck design for cooling-gas light-up prevention | Alexander Matyushkin, Alexei Marakhtanov, Keith Gaff, Felix Kozakevich | 2018-09-25 |
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2018-08-14 |
| 10026592 | Systems and methods for tailoring ion energy distribution function by odd harmonic mixing | Zhigang Chen, Alexei Marakhtanov | 2018-07-17 |
| 10002746 | Multi regime plasma wafer processing to increase directionality of ions | Alexei Marakhtanov, Lin Zhao, Felix Kozakevich, Kenneth Lucchesi, Zhigang Chen | 2018-06-19 |
| 9984859 | Impedance matching circuit for operation with a kilohertz RF generator and a megahertz RF generator to control plasma processes | Alexei Marakhtanov, Felix Kozakevich, Brett Jacobs | 2018-05-29 |
| 9978565 | Systems for cooling RF heated chamber components | Jon McChesney, Saravanapriyan Sriraman, Ricky Marsh, Alex Paterson | 2018-05-22 |
| 9947557 | Semiconductor processing system having multiple decoupled plasma sources | Peter L. G. Ventzek, Harmeet Singh, Richard A. Gottscho | 2018-04-17 |