Issued Patents All Time
Showing 51–75 of 128 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9883549 | Substrate support assembly having rapid temperature control | Alexander Matyushkin, Dan Katz, Theodoros Panagopoulos, Michael D. Willwerth | 2018-01-30 |
| 9852889 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Michael C. Kellogg, Alexei Marakhtanov, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2017-12-26 |
| 9761414 | Uniformity control circuit for use within an impedance matching circuit | Alexei Marakhtanov, Felix Kozakevich, Kenneth Lucchesi | 2017-09-12 |
| 9673058 | Method for etching features in dielectric layers | Scott Briggs, Eric A. Hudson, Leonid Belau, Mark Wilcoxson | 2017-06-06 |
| 9595424 | Impedance matching circuit for operation with a kilohertz RF generator and a megahertz RF generator to control plasma processes | Alexei Marakhtanov, Felix Kozakevich, Brett Jacobs | 2017-03-14 |
| 9564285 | Hybrid feature etching and bevel etching systems | Andreas Fischer | 2017-02-07 |
| 9536749 | Ion energy control by RF pulse shape | Alexei Marakhtanov, Zhigang Chen | 2017-01-03 |
| 9275887 | Substrate processing with rapid temperature gradient control | Alexander Matyushkin, Dan Katz, Theodoros Panagopoulos, Michael D. Willwerth | 2016-03-01 |
| 9177756 | E-beam enhanced decoupled source for semiconductor processing | Peter L. G. Ventzek, Harmeet Singh, Jun Shinagawa, Akira Koshiishi | 2015-11-03 |
| 9111728 | E-beam enhanced decoupled source for semiconductor processing | Peter L. G. Ventzek, Harmeet Singh, Jun Shinagawa, Akira Koshiishi | 2015-08-18 |
| 8980046 | Semiconductor processing system with source for decoupled ion and radical control | Akira Koshiishi, Peter L. G. Ventzek, Jun Shinagawa | 2015-03-17 |
| 8900403 | Semiconductor processing system having multiple decoupled plasma sources | Peter L. G. Ventzek, Harmeet Singh, Richard A. Gottscho | 2014-12-02 |
| 8900402 | Semiconductor processing system having multiple decoupled plasma sources | Peter L. G. Ventzek, Harmeet Singh, Richard A. Gottscho | 2014-12-02 |
| 8895452 | Substrate support providing gap height and planarization adjustment in plasma processing chamber | Jerrel K. Antolik, Yen-Kun Wang | 2014-11-25 |
| 8801896 | Method and apparatus for stable plasma processing | Valentin N. Todorow, Michael D. Willwerth | 2014-08-12 |
| 8663391 | Electrostatic chuck having a plurality of heater coils | Alexander Matyushkin, Dennis Koosau, Theodoros Panagopoulos | 2014-03-04 |
| 8475625 | Apparatus for etching high aspect ratio features | Sharma Pamarthy, Huutri Dao, Xiaoping Zhou, Kelly A. McDonough, Jivko Dinev +9 more | 2013-07-02 |
| 8349128 | Method and apparatus for stable plasma processing | Valentin N. Todorow, Michael D. Willwerth | 2013-01-08 |
| 8226769 | Substrate support with electrostatic chuck having dual temperature zones | Alexander Matyushkin, Dennis Koosau, Theodoros Panagopoulos | 2012-07-24 |
| 8075729 | Method and apparatus for controlling temperature of a substrate | Theodoros Panagopoulos | 2011-12-13 |
| 7879185 | Dual frequency RF match | Steven C. Shannon | 2011-02-01 |
| 7837838 | Method of fabricating a high dielectric constant transistor gate using a low energy plasma apparatus | Thai Cheng Chua, Alex Paterson, Steven C. H. Hung, Patricia M. Liu, Tatsuya Sato +1 more | 2010-11-23 |
| 7780864 | Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion radial distribution | Alexander Paterson, Valentin N. Todorow, Theodoros Panagopoulos, Brian K. Hatcher, Dan Katz +2 more | 2010-08-24 |
| 7777152 | High AC current high RF power AC-RF decoupling filter for plasma reactor heated electrostatic chuck | Valentin Todorov, Michael D. Willwerth, Alexander Paterson, Brian K. Hatcher, James E. Sammons, III | 2010-08-17 |
| 7727413 | Dual plasma source process using a variable frequency capacitively coupled source to control plasma ion density | Alexander Paterson, Valentin N. Todorow, Theodoros Panagopoulos, Brian K. Hatcher, Dan Katz +2 more | 2010-06-01 |