Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8637794 | Heating plate with planar heating zones for semiconductor processing | Harmeet Singh, Keith Gaff, Neil Benjamin | 2014-01-28 |
| 8624168 | Heating plate with diode planar heater zones for semiconductor processing | Keith Gaff | 2014-01-07 |
| 8587113 | Thermal plate with planar thermal zones for semiconductor processing | Keith Gaff, Anthony J. Ricci | 2013-11-19 |
| 8540843 | Plasma chamber top piece assembly | Leonard J. Sharpless | 2013-09-24 |
| 8519724 | Electrode for use in measuring dielectric properties of parts | Jaehyun Kim, Arthur H. Sato, Qing Liu, Feiyang Wu | 2013-08-27 |
| 8503151 | Plasma arrestor insert | — | 2013-08-06 |
| 8461674 | Thermal plate with planar thermal zones for semiconductor processing | Keith Gaff, Anthony J. Ricci | 2013-06-11 |
| 8269510 | Apparatus for measuring dielectric properties of parts | Jaehyun Kim, Arthur H. Sato, Qing Liu, Feiyang Wu | 2012-09-18 |
| 8084705 | Quartz guard ring centering features | Dean J. Larson, Daniel Arthur Brown, Victor Wang | 2011-12-27 |
| 8051556 | Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, James E. Tappan | 2011-11-08 |
| 8038796 | Apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, James E. Tappan | 2011-10-18 |
| 7998296 | Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system | Tony Ricci, Jim Tappan | 2011-08-16 |
| 7973539 | Methods for measuring dielectric properties of parts | Jaehyun Kim, Arthur H. Sato, Qing Liu, Feiyang Wu | 2011-07-05 |
| 7939784 | Electrostatic chuck support assembly | Robert Steger | 2011-05-10 |
| 7911213 | Methods for measuring dielectric properties of parts | Jaehyun Kim, Arthur H. Sato, Qing Liu, Feiyang Wu | 2011-03-22 |
| 7875824 | Quartz guard ring centering features | Dean J. Larson, Daniel Arthur Brown, Victor Wang | 2011-01-25 |
| 7854820 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa +4 more | 2010-12-21 |
| 7780791 | Apparatus for an optimized plasma chamber top piece | Leonard J. Sharpless | 2010-08-24 |
| 7777500 | Methods for characterizing dielectric properties of parts | Jaehyun Kim, Arthur H. Sato, Qing Liu, Feiyang Wu | 2010-08-17 |
| 7651269 | Temperature probes having a thermally isolated tip | — | 2010-01-26 |
| 7501605 | Method of tuning thermal conductivity of electrostatic chuck support assembly | Robert Steger | 2009-03-10 |
| 7431788 | Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system | Anthony J. Ricci, Jim Tappan | 2008-10-07 |
| 7223321 | Faraday shield disposed within an inductively coupled plasma etching apparatus | Robert Steger | 2007-05-29 |