| 7255772 |
High pressure processing chamber for semiconductor substrate |
Maximilian A. Biberger, Frederick P. Layman |
2007-08-14 |
| 7060422 |
Method of supercritical processing of a workpiece |
Maximilian A. Biberger, Frederick P. Layman |
2006-06-13 |
| 6926012 |
Method for supercritical processing of multiple workpieces |
Maximilian A. Biberger, Frederick P. Layman |
2005-08-09 |
| 6926798 |
Apparatus for supercritical processing of a workpiece |
Maximilian A. Biberger, Frederick P. Layman |
2005-08-09 |
| 6921456 |
High pressure processing chamber for semiconductor substrate |
Maximilian A. Biberger, Frederick P. Layman |
2005-07-26 |
| 6748960 |
Apparatus for supercritical processing of multiple workpieces |
Maximilian A. Biberger, Frederick P. Layman |
2004-06-15 |
| 6736149 |
Method and apparatus for supercritical processing of multiple workpieces |
Maximilian A. Biberger, Frederick P. Layman |
2004-05-18 |
| 6722642 |
High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism |
Maximilan Biberger |
2004-04-20 |
| 6487792 |
Method and apparatus for agitation of workpiece in high pressure environment |
Robert Koch |
2002-12-03 |
| 6263542 |
Tolerance resistant and vacuum compliant door hinge with open-assist feature |
Dean J. Larson |
2001-07-24 |
| 4755356 |
Locking microcentrifuge tube |
Paul B. Robbins, Arthur J. Robbins |
1988-07-05 |
