| 9719727 |
Fluid recirculation system for use in vapor phase particle production system |
— |
2017-08-01 |
| 9599405 |
Highly turbulent quench chamber |
Maximilian A. Biberger |
2017-03-21 |
| 9216398 |
Method and apparatus for making uniform and ultrasmall nanoparticles |
Maximilian A. Biberger |
2015-12-22 |
| 9180423 |
Highly turbulent quench chamber |
Maximilian A. Biberger |
2015-11-10 |
| 8906316 |
Fluid recirculation system for use in vapor phase particle production system |
— |
2014-12-09 |
| 8893651 |
Plasma-arc vaporization chamber with wide bore |
Maximilian A. Biberger |
2014-11-25 |
| 8828328 |
Methods and apparatuses for nano-materials powder treatment and preservation |
David Leamon, Eliseo Ruiz, Maximilian A. Biberger |
2014-09-09 |
| 8803025 |
Non-plugging D.C. plasma gun |
David Leamon |
2014-08-12 |
| 8663571 |
Method and apparatus for making uniform and ultrasmall nanoparticles |
Maximilian A. Biberger |
2014-03-04 |
| 8142619 |
Shape of cone and air input annulus |
Maximilian A. Biberger |
2012-03-27 |
| 8051724 |
Long cool-down tube with air input joints |
Maximilian A. Biberger |
2011-11-08 |
| 7897127 |
Collecting particles from a fluid stream via thermophoresis |
Maximilian A. Biberger |
2011-03-01 |
| D627900 |
Glove box |
— |
2010-11-23 |
| 7255772 |
High pressure processing chamber for semiconductor substrate |
Maximilian A. Biberger, Thomas Sutton |
2007-08-14 |
| 7060422 |
Method of supercritical processing of a workpiece |
Maximilian A. Biberger, Thomas Sutton |
2006-06-13 |
| 6926798 |
Apparatus for supercritical processing of a workpiece |
Maximilian A. Biberger, Thomas Sutton |
2005-08-09 |
| 6926012 |
Method for supercritical processing of multiple workpieces |
Maximilian A. Biberger, Thomas Sutton |
2005-08-09 |
| 6921456 |
High pressure processing chamber for semiconductor substrate |
Maximilian A. Biberger, Thomas Sutton |
2005-07-26 |
| 6748960 |
Apparatus for supercritical processing of multiple workpieces |
Maximilian A. Biberger, Thomas Sutton |
2004-06-15 |
| 6736149 |
Method and apparatus for supercritical processing of multiple workpieces |
Maximilian A. Biberger, Thomas Sutton |
2004-05-18 |
| 4764076 |
Valve incorporating wafer handling arm |
Phillip M. Hobson, Paul H. Dick |
1988-08-16 |
| 4713551 |
System for measuring the position of a wafer in a cassette |
Michael Kuhlman |
1987-12-15 |
| 4705951 |
Wafer processing system |
David Huntley, Paul H. Dick, George L. Coad, Michael Kuhlman, Roger M. Vecta +1 more |
1987-11-10 |