Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984296 | Substrate support with improved process uniformity | Fangli Hao, Zhigang Chen | 2024-05-14 |
| 10910195 | Substrate support with improved process uniformity | Fangli Hao, Zhigang Chen | 2021-02-02 |
| 10741425 | Helium plug design to reduce arcing | Fangli Hao, Zhigang Chen | 2020-08-11 |
| 10460978 | Boltless substrate support assembly | Fangli Hao, Zhigang Chen | 2019-10-29 |
| 10262887 | Pin lifter assembly with small gap | Fangli Hao | 2019-04-16 |
| 10187965 | Plasma confinement apparatus, and method for confining a plasma | Tuqiang Ni, Jinyuan Chen, Qing Qian, Zhaoyang Xu, Xusheng Zhou +1 more | 2019-01-22 |
| 8608851 | Plasma confinement apparatus, and method for confining a plasma | Tom Ni, Jinyuan Chen, Qing Qian, Zhaoyang Xu, Xusheng Zhou +1 more | 2013-12-17 |