Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6350317 | Linear drive system for use in a plasma processing system | Keith Dawson | 2002-02-26 |
| 6245192 | Gas distribution apparatus for semiconductor processing | Rajinder Dhindsa, Eric H. Lenz | 2001-06-12 |
| 6188564 | Method and apparatus for compensating non-uniform wafer processing in plasma processing chamber | — | 2001-02-13 |
| 6123775 | Reaction chamber component having improved temperature uniformity | Rajinder Dhindsa, Javad Pourhashemi | 2000-09-26 |
| 5966586 | Endpoint detection methods in plasma etch processes and apparatus therefor | — | 1999-10-12 |