Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8394723 | Aspect ratio adjustment of mask pattern using trimming to alter geometry of photoresist features | Juan Valdivia, Dave March, Charles Potter | 2013-03-12 |
| 7767584 | In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control | Harmeet Singh, Saurabh Ullal | 2010-08-03 |
| 7667281 | Method for hard mask CD trim | C. Robert Koemtzopoulos, Chris Lee, Alan J. Miller | 2010-02-23 |
| 7425277 | Method for hard mask CD trim | C. Robert Koemtzopoulos, Chris Lee, Alan J. Miller | 2008-09-16 |
| 7204913 | In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control | Harmeet Singh, Saurabh Ullal | 2007-04-17 |