Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7862682 | Showerhead electrode assemblies for plasma processing apparatuses | Thomas R. Stevenson, Saurabh Ullal | 2011-01-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7862682 | Showerhead electrode assemblies for plasma processing apparatuses | Thomas R. Stevenson, Saurabh Ullal | 2011-01-04 |