TK

Thomas A. Kamp

Lam Research: 3 patents #812 of 2,128Top 40%
Overall (All Time): #1,567,524 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7682980 Method to improve profile control and N/P loading in dual doped gate applications Helene Del Puppo, Frank Y. Lin, Chris Lee, Vahid Vahedi, Alan J. Miller +2 more 2010-03-23
7186661 Method to improve profile control and N/P loading in dual doped gate applications Helene Del Puppo, Frank Y. Lin, Chris Lee, Vahid Vahedi, Alan J. Miller +2 more 2007-03-06
7098141 Use of silicon containing gas for CD and profile feature enhancements of gate and shallow trench structures Alan J. Miller 2006-08-29