Issued Patents All Time
Showing 26–50 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir, David K. Carlson +9 more | 2017-09-19 |
| 9748121 | Thermal coupled quartz dome heat sink | Joseph M. Ranish, Mehmet Tugrul Samir | 2017-08-29 |
| 9711382 | Dome cooling using compliant material | Joseph M. Ranish | 2017-07-18 |
| 9580835 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2017-02-28 |
| 9570275 | Heated showerhead assembly | James D. Carducci, Olga Regelman, Kallol Bera, Douglas A. Buchberger, Jr. | 2017-02-14 |
| 9532401 | Susceptor support shaft with uniformity tuning lenses for EPI process | Zhepeng CONG, Balasubramanian Ramachandran, Masato Ishii, Xuebin Li, Mehmet Tugrul Samir +1 more | 2016-12-27 |
| 9322097 | EPI base ring | Steve Aboagye, Surajit Kumar, Anzhong Chang, Satheesh Kuppurao, Mehmet Tugrul Samir +1 more | 2016-04-26 |
| 9230837 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2016-01-05 |
| 8980044 | Plasma reactor with a multiple zone thermal control feed forward control apparatus | Richard Fovell, Hamid Tavassoli, Douglas A. Buchberger, Jr., Douglas H. Burns, Kallol Bera +5 more | 2015-03-17 |
| 8876024 | Heated showerhead assembly | James D. Carducci, Olga Regelman, Kallol Bera, Douglas A. Buchberger, Jr. | 2014-11-04 |
| D716240 | Lower chamber liner | Shu-Kwan LAU, Mehmet Tugrul Samir, Anzhong Chang, Richard O. Collins | 2014-10-28 |
| D711331 | Upper chamber liner | Shu-Kwan LAU, Mehmet Tugrul Samir, Anzhong Chang, Richard O. Collins | 2014-08-19 |
| 8801893 | Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor | Richard Fovell, Douglas A. Buchberger, Jr., Douglas H. Burns, Kallol Bera, Daniel J. Hoffman +4 more | 2014-08-12 |
| 8772055 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2014-07-08 |
| 8608900 | Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes | Douglas A. Buchberger, Jr., Richard Fovell, Hamid Tavassoli, Douglas H. Burns, Kallol Bera +1 more | 2013-12-17 |
| 8596336 | Substrate support temperature control | Richard Fovell, Sang In Yi, Anisul Khan, Jivko Dinev, Shane C. Nevil | 2013-12-03 |
| 8546267 | Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal control | Richard Fovell, Douglas A. Buchberger, Jr., Douglas H. Burns, Kallol Bera, Daniel J. Hoffman +4 more | 2013-10-01 |
| 8337660 | Capacitively coupled plasma reactor having very agile wafer temperature control | Douglas A. Buchberger, Jr., Richard Fovell, Hamid Tavassoli, Douglas H. Burns, Kallol Bera +5 more | 2012-12-25 |
| 8329586 | Method of processing a workpiece in a plasma reactor using feed forward thermal control | Douglas A. Buchberger, Jr., Richard Fovell, Douglas H. Burns, Kallol Bera, Daniel J. Hoffman +4 more | 2012-12-11 |
| 8231799 | Plasma reactor apparatus with multiple gas injection zones having time-changing separate configurable gas compositions for each zone | Kallol Bera, Xiaoye Zhao, Kenny L. Doan, Ezra Robert Gold, Bruno Geoffrion +2 more | 2012-07-31 |
| 8221580 | Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops | Douglas A. Buchberger, Jr., Richard Fovell, Hamid Tavassoli, Douglas H. Burns, Kallol Bera +5 more | 2012-07-17 |
| 8157951 | Capacitively coupled plasma reactor having very agile wafer temperature control | Douglas A. Buchberger, Jr., Richard Fovell, Hamid Tavassoli, Douglas H. Burns, Kallol Bera +1 more | 2012-04-17 |
| 8123902 | Gas flow diffuser | Daniel J. Hoffman, James D. Carducci, Xiaoping Zhou, Matthew L. Miller | 2012-02-28 |
| 8092638 | Capacitively coupled plasma reactor having a cooled/heated wafer support with uniform temperature distribution | Richard Fovell, Hamid Tavassoli, Douglas A. Buchberger, Jr., Douglas H. Burns, Kallol Bera +1 more | 2012-01-10 |
| 8092639 | Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes | Douglas A. Buchberger, Jr., Richard Fovell, Hamid Tavassoli, Douglas H. Burns, Kallol Bera +5 more | 2012-01-10 |