Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7879183 | Apparatus and method for front side protection during backside cleaning | Ying Rui, Nancy Fung, Martin Jeffrey Salinas, Ajit Balakrishna, Anchel Sheyner +2 more | 2011-02-01 |
| 7552736 | Process for wafer backside polymer removal with a ring of plasma under the wafer | Kenneth S. Collins, Hiroji Hanawa, Andrew Nguyen, Ajit Balakrishna, David Palagashvili +7 more | 2009-06-30 |
| 6366346 | Method and apparatus for optical detection of effluent composition | Thomas Nowak, Sebastien Raoux, Dave Silvetti, Stefan Wolff, Russ Newman +1 more | 2002-04-02 |
| 6123097 | Apparatus and methods for controlling process chamber pressure | Quoc Truong, Vincente Lim, Craig Bercaw | 2000-09-26 |