Patents per Year
Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8911193 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2014-12-16 | $14,131,000 |
| 8066466 | Substrate processing sequence in a Cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2011-11-29 | $8,648,000 |
| 7798764 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2010-09-21 | $8,059,000 |
| 7651306 | Cartesian robot cluster tool architecture | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2010-01-26 | $9,867,000 |
| 6366346 | Method and apparatus for optical detection of effluent composition | Thomas Nowak, Sebastien Raoux, Stefan Wolff, Russ Newman, Imad Yousif +1 more | 2002-04-02 | $41,044,000 |