Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5885356 | Method of reducing residue accumulation in CVD chamber using ceramic lining | Jun Zhao, Xin Sheng Guo, Atsushi Tabata, Jianmin Qiao, Alex Schreiber | 1999-03-23 |
| 5853607 | CVD processing chamber | Jun Zhao, Charles Dornfest, Stefan Wolff, Kevin Fairbairn, Xin Sheng Guo +2 more | 1998-12-29 |
| 5558717 | CVD Processing chamber | Jun Zhao, Charles Dornfest, Stefan Wolff, Kevin Fairbairn, Xin Sheng Guo +2 more | 1996-09-24 |
| 5441568 | Exhaust baffle for uniform gas flow pattern | Christopher S. Ngai | 1995-08-15 |