Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10189141 | Chamber components with polished internal apertures | Jennifer Y. Sun, David Koonce, Biraja P. Kanungo | 2019-01-29 |
| 10119188 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho | 2018-11-06 |
| 9976211 | Plasma erosion resistant thin film coating for high temperature application | Biraja P. Kanungo, Jennifer Y. Sun, Martin Jeff Salinas, Jared Ahmad Lee | 2018-05-22 |
| 9970095 | Ion assisted deposition top coat of rare-earth oxide | Jennifer Y. Sun, Biraja P. Kanungo | 2018-05-15 |
| 9937587 | Process for friction stir welding dissimilar metals and workpiece assemblies formed thereby | Sindo Kou | 2018-04-10 |
| 9916998 | Substrate support assembly having a plasma resistant protective layer | Jennifer Y. Sun, Senh Thach, Biraja P. Kanungo | 2018-03-13 |
| 9879348 | High purity metallic top coat for semiconductor manufacturing components | Jennifer Y. Sun | 2018-01-30 |
| 9869012 | Ion assisted deposition for rare-earth oxide based coatings | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2018-01-16 |
| 9869013 | Ion assisted deposition top coat of rare-earth oxide | Jennifer Y. Sun, Biraja P. Kanungo | 2018-01-16 |
| 9850568 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho | 2017-12-26 |
| 9812341 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2017-11-07 |
| 9797037 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2017-10-24 |
| 9725799 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2017-08-08 |
| 9711334 | Ion assisted deposition for rare-earth oxide based thin film coatings on process rings | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2017-07-18 |
| 9687953 | Chamber components with polished internal apertures | Jennifer Y. Sun, David Koonce, Biraja P. Kanungo | 2017-06-27 |
| 9663870 | High purity metallic top coat for semiconductor manufacturing components | Jennifer Y. Sun | 2017-05-30 |
| 9583369 | Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2017-02-28 |
| 9420639 | Smart device fabrication via precision patterning | Jennifer Y. Sun, Yikai Chen, Biraja P. Kanungo | 2016-08-16 |
| 8464926 | Method of friction stir welding dissimilar metals and workpiece assemblies formed thereby | Sindo Kou | 2013-06-18 |