Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8288828 | Via contact structure having dual silicide layers | Michael Iwatake, Matthew Oonk, Amanda Piper, Yun-Yu Wang, Keith Kwong Hon Wong | 2012-10-16 |
| 7538029 | Method of room temperature growth of SiOx on silicide as an etch stop layer for metal contact open of semiconductor devices | Yun-Yu Wang, Christian Lavoie, Conal E. Murray, Matthew Oonk | 2009-05-26 |
| 7479436 | Feed forward silicide control scheme based on spacer height controlling preclean time | Ricky S. Amos, Bryant C. Colwill | 2009-01-20 |
| 7344983 | Clustered surface preparation for silicide and metal contacts | Sadanand V. Deshpande, Ying Li, Renee T. Mo, Wesley C. Natzle, Kirk D. Peterson +1 more | 2008-03-18 |
| 7015140 | Selective salicidation methods | Russell H. Arndt, Kenneth J. Giewont, M. Dean Sciacca | 2006-03-21 |
| 5956604 | Ohmic contact to Gallium Arsenide using epitaxially deposited Cobalt Digermanide | Sabrina L. Lee, Steven R. Soss, Toh-Ming Lu, Shyam P. Murarka | 1999-09-21 |