Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8747631 | Apparatus and method utilizing a double glow discharge plasma for sputter cleaning | Ronghua Wei, Edward Langa | 2014-06-10 |
| 8273222 | Apparatus and method for RF plasma enhanced magnetron sputter deposition | Ronghua Wei | 2012-09-25 |
| 5956604 | Ohmic contact to Gallium Arsenide using epitaxially deposited Cobalt Digermanide | Kevin E. Mello, Steven R. Soss, Toh-Ming Lu, Shyam P. Murarka | 1999-09-21 |