Issued Patents All Time
Showing 26–50 of 104 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9881804 | Method and system for high precision etching of substrates | Jianping Zhao | 2018-01-30 |
| 9852893 | Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus | Lee Chen, Demetre J. Economou, Jianping Zhao | 2017-12-26 |
| 9799494 | Energetic negative ion impact ionization plasma | Lee Chen | 2017-10-24 |
| 9793095 | Microwave surface-wave plasma device | Jianping Zhao, Lee Chen, Toshihiko Iwao, Toshihisa Nozawa, Zhiying Chen +1 more | 2017-10-17 |
| 9728416 | Plasma tuning rods in microwave resonator plasma sources | Jianping Zhao, Lee Chen, Iwao Toshihiko, Peter L. G. Ventzek | 2017-08-08 |
| 9668332 | Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma | Lee Chen, Zhiying Chen | 2017-05-30 |
| 9431218 | Scalable and uniformity controllable diffusion plasma source | Jianping Zhao, Lee Chen, Radha Sundararajan | 2016-08-30 |
| 9396955 | Plasma tuning rods in microwave resonator processing systems | Jianping Zhao, Lee Chen, Iwao Toshihiko, Peter L. G. Ventzek | 2016-07-19 |
| 9396900 | Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties | Barton Lane, Lee Chen, Peter L. G. Ventzek, Jianping Zhao, Radha Sundararajan | 2016-07-19 |
| 9301383 | Low electron temperature, edge-density enhanced, surface wave plasma (SWP) processing method and apparatus | Jianping Zhao, Lee Chen, Radha Sundararajan | 2016-03-29 |
| 9288890 | Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma | Lee Chen, Zhiying Chen | 2016-03-15 |
| 9209032 | Electric pressure systems for control of plasma properties and uniformity | Jianping Zhao, Lee Chen, Zhiying Chen | 2015-12-08 |
| 9151286 | Processing chamber integrated pressure control | Lee Chen | 2015-10-06 |
| 9111727 | Plasma tuning rods in microwave resonator plasma sources | Jianping Zhao, Lee Chen, Toshihiko Iwao, Peter L. G. Ventzek | 2015-08-18 |
| 9111873 | Low profile magnetic filter | Lee Chen, Jianping Zhao, Zhiying Chen | 2015-08-18 |
| 9087677 | Methods of electrical signaling in an ion energy analyzer | Lee Chen, Barton Lane, Jianping Zhao, Radha Sundararajan | 2015-07-21 |
| 8968588 | Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus | Jianping Zhao, Lee Chen, Vincent M. Donnelly, Demetre J. Economou, Radha Sundararajan | 2015-03-03 |
| 8847159 | Ion energy analyzer | Lee Chen, Barton Lane, Jianping Zhao, Radha Sundararajan | 2014-09-30 |
| 8816281 | Ion energy analyzer and methods of manufacturing the same | Lee Chen, Barton Lane, Jianping Zhao, Radha Sundararajan | 2014-08-26 |
| 8808496 | Plasma tuning rods in microwave processing systems | Jianping Zhao, Lee Chen, Toshihiko Iwao, Peter L. G. Ventzek | 2014-08-19 |
| 8747610 | Plasma source pumping and gas injection baffle | Lee Chen | 2014-06-10 |
| 8721833 | Variable capacitance chamber component incorporating ferroelectric materials and methods of manufacturing and using thereof | Zhiying Chen, Jianping Zhao, Lee Chen, Radha Sundararajan | 2014-05-13 |
| 8669705 | Stable surface wave plasma source | Lee Chen, Jianping Zhao, Ronald Victor Bravenec | 2014-03-11 |
| 8532796 | Contact processing using multi-input/multi-output (MIMO) models | Daniel Prager, Peter Biolsi, Ryukichi Shimizu | 2013-09-10 |
| 8501499 | Adaptive recipe selector | Radha Sundararajan, Lee Chen, Barton Lane | 2013-08-06 |