IT

Iwao Toshihiko

TL Tokyo Electron Limited: 2 patents #2,602 of 5,567Top 50%
Overall (All Time): #1,987,757 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9728416 Plasma tuning rods in microwave resonator plasma sources Jianping Zhao, Lee Chen, Merritt Funk, Peter L. G. Ventzek 2017-08-08
9396955 Plasma tuning rods in microwave resonator processing systems Jianping Zhao, Lee Chen, Merritt Funk, Peter L. G. Ventzek 2016-07-19