Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728416 | Plasma tuning rods in microwave resonator plasma sources | Jianping Zhao, Lee Chen, Merritt Funk, Peter L. G. Ventzek | 2017-08-08 |
| 9396955 | Plasma tuning rods in microwave resonator processing systems | Jianping Zhao, Lee Chen, Merritt Funk, Peter L. G. Ventzek | 2016-07-19 |