Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443165 | Method for cleaning plasma treatment device and plasma treatment system | Takashi Akahori, Masaki Tozawa, Risa Nakase, Shuichi Ishizuka, Masahide Saito +1 more | 2002-09-03 |
| 6355902 | Plasma film forming method and plasma film forming apparatus | Takashi Akahori, Masaki Tozawa, Risa Nakase, Osamu Yokoyama, Shuichi Ishizuka +4 more | 2002-03-12 |
| 6333269 | Plasma treatment system and method | Hideaki Amano | 2001-12-25 |
| 6218299 | Semiconductor device and method for producing the same | Takashi Akahori, Shunichi Endo, Masahide Saito, Takeshi Aoki, Tadashi Hirata | 2001-04-17 |
| 6215087 | Plasma film forming method and plasma film forming apparatus | Takashi Akahori, Masaki Tozawa, Risa Nakase, Osamu Yokoyama, Shuichi Ishizuka +4 more | 2001-04-10 |