Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027367 | Substrate treatment apparatus and manufacturing method of semiconductor device | Masayuki Kitamura, Tomotaka ARIGA | 2024-07-02 |
| 12010845 | Method for manufacturing semiconductor device | Katsuaki Natori, Hiroshi Toyoda, Koji Yamakawa, Masayuki Kitamura | 2024-06-11 |
| 11699731 | Semiconductor device and manufacturing method thereof | Masayuki Kitamura, Hiroshi Toyoda, Katsuaki Natori | 2023-07-11 |
| 11282681 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Katsuaki Natori, Hiroshi Toyoda, Masayuki Kitamura | 2022-03-22 |
| 11189489 | Substrate treatment apparatus and manufacturing method of semiconductor device | Masayuki Kitamura, Tomotaka ARIGA | 2021-11-30 |