Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191188 | Transfer device, transfer system, and end effector | Norihiko Amikura, Masatomo KITA, Masahiro DOGOME, Daisuke Hayashi, Toshiaki TOYOMAKI | 2025-01-07 |
| 12074043 | Transfer device and teaching method of robot arm | Ryosuke Kanamaru | 2024-08-27 |
| 10872798 | Substrate transfer mechanism, substrate processing apparatus, and substrate transfer method | — | 2020-12-22 |
| 10777437 | Storage unit, transfer apparatus, and substrate processing system | — | 2020-09-15 |