Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074043 | Transfer device and teaching method of robot arm | Takami FUKASAWA | 2024-08-27 |
| 11837485 | Substrate holding hand and substrate conveying apparatus | Tetsuya Yoshida, Shinya Kinoshita, Takayuki Fukushima | 2023-12-05 |
| 10553471 | Substrate conveying system and method | Yasuhiko Hashimoto, Takayuki Fukushima, Shinya Kinoshita, Daiki Miyagawa | 2020-02-04 |
| 10483143 | End effector and substrate conveying robot | Yasuhiko Hashimoto, Takayuki Fukushima, Shinya Kinoshita, Daiki Miyagawa | 2019-11-19 |
| 10354899 | Wafer transfer method and wafer transfer device | Takayuki Fukushima | 2019-07-16 |
| 10062594 | End effector device | Takayuki Fukushima, Daiki Miyagawa | 2018-08-28 |
| 9343344 | End effector device | Yasuhiko Hashimoto, Takayuki Fukushima, Daiki Miyagawa | 2016-05-17 |