Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12285786 | Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning method | Norihiko Amikura, Hideyuki OSADA, Seiichi Kaise, Masatomo KITA, Takashi Takizawa +1 more | 2025-04-29 |
| 12062557 | Substrate processing system and particle removal method | Daisuke Hara, Hideyuki OSADA, Hikaru Nihei, Tatsuya Morioka, Akihiro Matsui | 2024-08-13 |
| 10133266 | Conveyance robot replacement apparatus and conveyance robot replacement method | Masahiro DOGOME, Hiroshi IKARI, Toshiaki TOYOMAKI, Takehiro Shindo | 2018-11-20 |
| 10010913 | Purging apparatus and purging method for substrate storage container | Seiichi Kaise, Shigeki Amemiya | 2018-07-03 |