Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139334 | Particulate measurement device | Akitake Tamura | 2018-11-27 |
| 8911955 | Virus detection device and virus detection method | Akitake Tamura, Misako Saito | 2014-12-16 |
| 8608422 | Particle sticking prevention apparatus and plasma processing apparatus | Tsuyoshi Moriya, Hiroshi Nagaike, Teruyuki Hayashi | 2013-12-17 |
| 8008211 | Pattern forming method, semiconductor device manufacturing apparatus and storage medium | Akitake Tamura, Teruyuki Hayashi | 2011-08-30 |
| 7508518 | Particle measuring method and particle measuring apparatus | Akitake Tamura, Teruyuki Hayashi | 2009-03-24 |
| 6883283 | Semiconductor manufacturing facility and a semiconductor manufacturing method | Osamu Suenaga, Kazuo Yamamoto, Sadao Kobayashi | 2005-04-26 |
| 5910727 | Electrical inspecting apparatus with ventilation system | Motohiro Kuji | 1999-06-08 |
| 5445521 | Heat treating method and device | Eiji Yamaguchi, Takenobu Matsuo, Hirofumi Kitayama | 1995-08-29 |