Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7212977 | Managing apparatus and managing method of a semiconductor manufacturing apparatus | Akitoshi Tsuji, Kiyoshi Komiyama | 2007-05-01 |
| 7160362 | Method and device for cleaning air | Isao Terada, Minoru Tanaka, Yuji Matumura, Sadao Kobayashi, Naoki Mori +2 more | 2007-01-09 |
| 6949719 | Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator | Wataru Okase, Takenobu Matsuo | 2005-09-27 |
| 6883283 | Semiconductor manufacturing facility and a semiconductor manufacturing method | Kazuo Yamamoto, Kaoru Fujihara, Sadao Kobayashi | 2005-04-26 |
| 6881685 | Device and method for feeding treating air | Sadao Kobayashi | 2005-04-19 |
| 6799539 | System and method for utilization of waste heat of semiconductor equipment and heat exchanger used for utilization of waste heat of semiconductor equipment | Sadao Kobayashi | 2004-10-05 |
| 6756565 | Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator | Wataru Okase, Takenobu Matsuo | 2004-06-29 |
| 6569696 | Device and method for manufacturing semiconductor | Makoto Yamamoto, Naoki Mori, Hiromu Ito, Sadao Kobayashi | 2003-05-27 |
| 6547660 | Semiconductor manufacturing facility, semiconductor manufacturing apparatus and semiconductor manufacturing method | Tadahiro Ohmi, Sadao Kobayashi | 2003-04-15 |
| 6427462 | Semiconductor manufacturing facility, semiconductor manufacturing apparatus and semiconductor manufacturing method | Tadahiro Ohmi, Sadao Kobayashi | 2002-08-06 |
| 6370897 | Semiconductor manufacturing facility | Tadahiro Ohmi, Sadao Kobayashi | 2002-04-16 |