Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8261762 | Processing gas supplying system and processing gas supplying method | Akitoshi Tsuji, Takuya Fujiwara | 2012-09-11 |
| 7229843 | Device and method for monitoring process exhaust gas, semiconductor manufacturing device, and system and method for controlling semiconductor manufacturing device | Takahiro Shimoda, Hiroshi Nishikawa | 2007-06-12 |
| 7212977 | Managing apparatus and managing method of a semiconductor manufacturing apparatus | Akitoshi Tsuji, Osamu Suenaga | 2007-05-01 |
| 6942891 | Device and method for monitoring process exhaust gas, semiconductor manufacturing device, and system and method for controlling semiconductor manufacturing device | Takahiro Shimoda, Hiroshi Nishikawa | 2005-09-13 |
| 6900439 | Gas leakage detection system, gas leakage detection method and semiconductor manufacturing apparatus | Shinichi Watanabe, Kazunori Gotoda | 2005-05-31 |
| 6716477 | Method and apparatus for monitoring process exhaust gas, semiconductor-manufacturing device and method and system for managing semiconductor-manufacturing device | Takahiro Shimoda, Hiroshi Nishikawa | 2004-04-06 |
| 6582296 | Ventilating method and ventilating system for semiconductor manufacturing apparatuses | — | 2003-06-24 |
| 6530136 | Method for transporting and installing a semiconductor manufacturing apparatus | — | 2003-03-11 |