Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900439 | Gas leakage detection system, gas leakage detection method and semiconductor manufacturing apparatus | Kiyoshi Komiyama, Shinichi Watanabe | 2005-05-31 |
| 5672325 | Method for the oxidation treatment of decaborane gas | Hajime Hiratsuka, Junichi Yagyu, Tetsuaki Marufuji | 1997-09-30 |