Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7229843 | Device and method for monitoring process exhaust gas, semiconductor manufacturing device, and system and method for controlling semiconductor manufacturing device | Kiyoshi Komiyama, Hiroshi Nishikawa | 2007-06-12 |
| 6942891 | Device and method for monitoring process exhaust gas, semiconductor manufacturing device, and system and method for controlling semiconductor manufacturing device | Kiyoshi Komiyama, Hiroshi Nishikawa | 2005-09-13 |
| 6805135 | Cleaning fluid and cleaning method for component of semiconductor-treating apparatus | Kenichi Hirota, Hitoshi Yamada, Kiyoshi Yuasa, Eiji Yamaguchi, Shinichi Kawaguchi +1 more | 2004-10-19 |
| 6716477 | Method and apparatus for monitoring process exhaust gas, semiconductor-manufacturing device and method and system for managing semiconductor-manufacturing device | Kiyoshi Komiyama, Hiroshi Nishikawa | 2004-04-06 |
| 5704981 | Processing apparatus for substrates to be processed | Shunji Kawakami, Yoji Mizutani, Yutaka Miura | 1998-01-06 |