Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11117144 | Cyclone collector | — | 2021-09-14 |
| 10509029 | Measurement device and measurement method | — | 2019-12-17 |
| 10222363 | Measurement device and measurement method | — | 2019-03-05 |
| 10139334 | Particulate measurement device | Kaoru Fujihara | 2018-11-27 |
| 8950999 | Substrate processing apparatus and particle adhesion preventing method | Teruyuki Hayashi | 2015-02-10 |
| 8911955 | Virus detection device and virus detection method | Kaoru Fujihara, Misako Saito | 2014-12-16 |
| 8673086 | Method and device for cleaning a substrate and storage medium | Akinobu Kakimoto, Kazuya Dobashi | 2014-03-18 |
| 8008211 | Pattern forming method, semiconductor device manufacturing apparatus and storage medium | Teruyuki Hayashi, Kaoru Fujihara | 2011-08-30 |
| 7648895 | Vertical CVD apparatus for forming silicon-germanium film | Masaki Kurokawa, Katsuhiko Komori, Norifumi Kimura, Kazuhide Hasebe, Takehiko Fujita +1 more | 2010-01-19 |
| 7615163 | Film formation apparatus and method of using the same | Shigeru Nakajima, Tetsushi Ozaki | 2009-11-10 |
| 7508518 | Particle measuring method and particle measuring apparatus | Kaoru Fujihara, Teruyuki Hayashi | 2009-03-24 |
| 7211514 | Heat-processing method for semiconductor process under a vacuum pressure | Takehiko Fujita, Keisuke Suzuki, Kazuhide Hasebe, Mitsuhiro Okada | 2007-05-01 |
| 7008881 | Method for forming silicon epitaxial layer | Satoshi Oka | 2006-03-07 |