Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133265 | Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends | Aaron Archer Waterman, Yuichiro Morozumi, Sanjeev Kaushal, Sukesh Janubhai Patel | 2018-11-20 |
| 9405289 | Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends | Aaron Archer Waterman, Yuichiro Morozumi, Sanjeev Kaushal, Sukesh Janubhai Patel | 2016-08-02 |
| 8129775 | Semiconductor device and method of manufacturing the same | Koji Akiyama, Hirokazu Higashijima, Tetsuya Shibata | 2012-03-06 |
| 7615163 | Film formation apparatus and method of using the same | Akitake Tamura, Shigeru Nakajima | 2009-11-10 |