Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10635993 | System and method for learning and/or optimizing manufacturing processes | Sukesh Janubhai Patel | 2020-04-28 |
| 10571900 | Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing | Sukesh Janubhai Patel, Wolfgang Polak, Aaron Archer Waterman, Orion Wolfe | 2020-02-25 |
| 10228678 | Tool failure analysis using space-distorted similarity | Sukesh Janubhai Patel, Wolfgang Polak, Orion Wolfe | 2019-03-12 |
| 10133265 | Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends | Aaron Archer Waterman, Yuichiro Morozumi, Tetsushi Ozaki, Sukesh Janubhai Patel | 2018-11-20 |
| 9746849 | Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing | Sukesh Janubhai Patel, Wolfgang Polak, Aaron Archer Waterman, Orion Wolfe | 2017-08-29 |
| 9424528 | Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool | Sukesh Janubhai Patel, Kenji Sugishima | 2016-08-23 |
| 9405289 | Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends | Aaron Archer Waterman, Yuichiro Morozumi, Tetsushi Ozaki, Sukesh Janubhai Patel | 2016-08-02 |
| 9396443 | System and method for learning and/or optimizing manufacturing processes | Sukesh Janubhai Patel | 2016-07-19 |
| 9275335 | Autonomous biologically based learning tool | Sukesh Janubhai Patel, Kenji Sugishima | 2016-03-01 |
| 8954184 | Tool performance by linking spectroscopic information with tool operational parameters and material measurement information | Sukesh Janubhai Patel, Kenji Sugishima | 2015-02-10 |
| 8744607 | Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool | Sukesh Janubhai Patel, Kenji Sugishima | 2014-06-03 |
| 8725667 | Method and system for detection of tool performance degradation and mismatch | Sukesh Janubhai Patel, Kenji Sugishima | 2014-05-13 |
| 8723869 | Biologically based chamber matching | Kenji Sugishima, Sukesh Janubhai Patel, Robert Filman, Wolfgang Polak, Orion Wolfe +1 more | 2014-05-13 |
| 8396582 | Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool | Sukesh Janubhai Patel, Kenji Sugishima | 2013-03-12 |
| 8190543 | Autonomous biologically based learning tool | Sukesh Janubhai Patel, Kenji Sugishima | 2012-05-29 |
| 8078552 | Autonomous adaptive system and method for improving semiconductor manufacturing quality | Sukesh Janubhai Patel, Kenji Sugishima | 2011-12-13 |
| 8026113 | Method of monitoring a semiconductor processing system using a wireless sensor network | Kenji Sugishima, Donthineni Ramesh Kumar Rao | 2011-09-27 |
| 7838072 | Method and apparatus for monolayer deposition (MLD) | Pradeep Pandey, Kenji Sugishima | 2010-11-23 |
| 7737051 | Silicon germanium surface layer for high-k dielectric integration | Anthony Dip, Pradip K. Roy, Allen J. Leith, Seungho Oh, Raymond Joe | 2010-06-15 |
| 7710565 | Method of correcting systematic error in a metrology system | Sairam Sankaranarayanan, Kenji Sugishima | 2010-05-04 |
| 7561269 | Optical measurement system with systematic error correction | Sairam Sankaranarayanan, Kenji Sugishima | 2009-07-14 |
| 7526699 | Method for creating a built-in self test (BIST) table for monitoring a monolayer deposition (MLD) system | Pradeep Pandey, Kenji Sugishima | 2009-04-28 |
| 7519885 | Monitoring a monolayer deposition (MLD) system using a built-in self test (BIST) table | Pradeep Pandey, Kenji Sugishima | 2009-04-14 |
| 7459175 | Method for monolayer deposition | Pradeep Pandey, Kenji Sugishima | 2008-12-02 |
| 7452793 | Wafer curvature estimation, monitoring, and compensation | Kenji Sugishima, Pradeep Pandey | 2008-11-18 |