Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9424528 | Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool | Sanjeev Kaushal, Sukesh Janubhai Patel | 2016-08-23 |
| 9275335 | Autonomous biologically based learning tool | Sanjeev Kaushal, Sukesh Janubhai Patel | 2016-03-01 |
| 8954184 | Tool performance by linking spectroscopic information with tool operational parameters and material measurement information | Sanjeev Kaushal, Sukesh Janubhai Patel | 2015-02-10 |
| 8744607 | Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool | Sanjeev Kaushal, Sukesh Janubhai Patel | 2014-06-03 |
| 8725667 | Method and system for detection of tool performance degradation and mismatch | Sanjeev Kaushal, Sukesh Janubhai Patel | 2014-05-13 |
| 8723869 | Biologically based chamber matching | Sanjeev Kaushal, Sukesh Janubhai Patel, Robert Filman, Wolfgang Polak, Orion Wolfe +1 more | 2014-05-13 |
| 8396582 | Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool | Sanjeev Kaushal, Sukesh Janubhai Patel | 2013-03-12 |
| 8190543 | Autonomous biologically based learning tool | Sanjeev Kaushal, Sukesh Janubhai Patel | 2012-05-29 |
| 8078552 | Autonomous adaptive system and method for improving semiconductor manufacturing quality | Sanjeev Kaushal, Sukesh Janubhai Patel | 2011-12-13 |
| 8026113 | Method of monitoring a semiconductor processing system using a wireless sensor network | Sanjeev Kaushal, Donthineni Ramesh Kumar Rao | 2011-09-27 |
| 7838072 | Method and apparatus for monolayer deposition (MLD) | Sanjeev Kaushal, Pradeep Pandey | 2010-11-23 |
| 7710565 | Method of correcting systematic error in a metrology system | Sanjeev Kaushal, Sairam Sankaranarayanan | 2010-05-04 |
| 7561269 | Optical measurement system with systematic error correction | Sanjeev Kaushal, Sairam Sankaranarayanan | 2009-07-14 |
| 7526699 | Method for creating a built-in self test (BIST) table for monitoring a monolayer deposition (MLD) system | Sanjeev Kaushal, Pradeep Pandey | 2009-04-28 |
| 7519885 | Monitoring a monolayer deposition (MLD) system using a built-in self test (BIST) table | Sanjeev Kaushal, Pradeep Pandey | 2009-04-14 |
| 7459175 | Method for monolayer deposition | Sanjeev Kaushal, Pradeep Pandey | 2008-12-02 |
| 7452793 | Wafer curvature estimation, monitoring, and compensation | Sanjeev Kaushal, Pradeep Pandey | 2008-11-18 |
| 7444572 | Built-in self test for a thermal processing system | Sanjeev Kaushal, Pradeep Pandey | 2008-10-28 |
| 7406644 | Monitoring a thermal processing system | Sanjeev Kaushal, Pradeep Pandey | 2008-07-29 |
| 7342244 | Spintronic transistor | Sanjeev Kaushal, Swaroop Ganguly | 2008-03-11 |
| 7340377 | Monitoring a single-wafer processing system | Sanjeev Kaushal, Pradeep Pandey | 2008-03-04 |
| 7302363 | Monitoring a system during low-pressure processes | Sanjeev Kaushal, Pradeep Pandey | 2007-11-27 |
| 7165011 | Built-in self test for a thermal processing system | Sanjeev Kaushal, Pradeep Pandey, Anthony Dip, David Q. Smith, Raymond Joe +1 more | 2007-01-16 |
| 7101816 | Methods for adaptive real time control of a thermal processing system | Sanjeev Kaushal, Pradeep Pandey | 2006-09-05 |
| 7025280 | Adaptive real time control of a reticle/mask system | Sanjeev Kaushal, Pradeep Pandey | 2006-04-11 |