Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7838072 | Method and apparatus for monolayer deposition (MLD) | Sanjeev Kaushal, Kenji Sugishima | 2010-11-23 |
| 7526699 | Method for creating a built-in self test (BIST) table for monitoring a monolayer deposition (MLD) system | Sanjeev Kaushal, Kenji Sugishima | 2009-04-28 |
| 7519885 | Monitoring a monolayer deposition (MLD) system using a built-in self test (BIST) table | Sanjeev Kaushal, Kenji Sugishima | 2009-04-14 |
| 7459175 | Method for monolayer deposition | Sanjeev Kaushal, Kenji Sugishima | 2008-12-02 |
| 7452793 | Wafer curvature estimation, monitoring, and compensation | Sanjeev Kaushal, Kenji Sugishima | 2008-11-18 |
| 7444572 | Built-in self test for a thermal processing system | Sanjeev Kaushal, Kenji Sugishima | 2008-10-28 |
| 7406644 | Monitoring a thermal processing system | Sanjeev Kaushal, Kenji Sugishima | 2008-07-29 |
| 7340377 | Monitoring a single-wafer processing system | Sanjeev Kaushal, Kenji Sugishima | 2008-03-04 |
| 7302363 | Monitoring a system during low-pressure processes | Sanjeev Kaushal, Kenji Sugishima | 2007-11-27 |
| 7165011 | Built-in self test for a thermal processing system | Sanjeev Kaushal, Kenji Sugishima, Anthony Dip, David Q. Smith, Raymond Joe +1 more | 2007-01-16 |
| 7126957 | Media flow method for transferring real-time data between asynchronous and synchronous networks | Sridhar G. Sharma Isukapalli, Matthew D. Shaver, Neal A. Schneider, Gary Tsztoo | 2006-10-24 |
| 7101816 | Methods for adaptive real time control of a thermal processing system | Sanjeev Kaushal, Kenji Sugishima | 2006-09-05 |
| 7025280 | Adaptive real time control of a reticle/mask system | Sanjeev Kaushal, Kenji Sugishima | 2006-04-11 |
| 6803548 | Batch-type heat treatment apparatus and control method for the batch-type heat treatment apparatus | Wenling Wang, Koichi Sakamoto, Fujio Suzuki, Moyuru Yasuhara, Sunil Shah +1 more | 2004-10-12 |
| 6730885 | Batch type heat treatment system, method for controlling same, and heat treatment method | Fujio Suzuki, Wenling Wang, Koichi Sakamoto, Moyuru Yasuhara, Sunil Shah | 2004-05-04 |
| 6452291 | Reduction of switching transients via large signal/small signal thresholding | Mark Erickson, Thorkell Gudmundsson | 2002-09-17 |
| 6289255 | Method for computer-aided design of a product or process | Sunil Shah | 2001-09-11 |
| 6289508 | Method and apparatus for dynamic optimization | Mark Erickson, Sunil Shah, Thorkell Gudmundsson | 2001-09-11 |
| 6285971 | Method for real-time nonlinear system state estimation and control | Sunil Shah | 2001-09-04 |
| 6195594 | Real-time planner for design | Sunil Shah, Thorkell Gudmundsson, Mark Erickson | 2001-02-27 |
| 6167360 | Method and apparatus for dynamic optimization | Mark Erickson, Sunil Shah, Thorkell Gudmundsson | 2000-12-26 |
| 6041172 | Multiple scale signal processing and control system | Sunil Shah, Mark Erickson | 2000-03-21 |
| 5991525 | Method for real-time nonlinear system state estimation and control | Sunil Shah | 1999-11-23 |
| 5880959 | Method for computer-aided design of a product or process | Sunil Shah | 1999-03-09 |
| 5517594 | Thermal reactor optimization | Sunil Shah | 1996-05-14 |