Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10635993 | System and method for learning and/or optimizing manufacturing processes | Sanjeev Kaushal | 2020-04-28 |
| 10571900 | Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing | Sanjeev Kaushal, Wolfgang Polak, Aaron Archer Waterman, Orion Wolfe | 2020-02-25 |
| 10228678 | Tool failure analysis using space-distorted similarity | Sanjeev Kaushal, Wolfgang Polak, Orion Wolfe | 2019-03-12 |
| 10133265 | Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends | Aaron Archer Waterman, Yuichiro Morozumi, Tetsushi Ozaki, Sanjeev Kaushal | 2018-11-20 |
| 9746849 | Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing | Sanjeev Kaushal, Wolfgang Polak, Aaron Archer Waterman, Orion Wolfe | 2017-08-29 |
| 9424528 | Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool | Sanjeev Kaushal, Kenji Sugishima | 2016-08-23 |
| 9405289 | Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends | Aaron Archer Waterman, Yuichiro Morozumi, Tetsushi Ozaki, Sanjeev Kaushal | 2016-08-02 |
| 9396443 | System and method for learning and/or optimizing manufacturing processes | Sanjeev Kaushal | 2016-07-19 |
| 9275335 | Autonomous biologically based learning tool | Sanjeev Kaushal, Kenji Sugishima | 2016-03-01 |
| 8954184 | Tool performance by linking spectroscopic information with tool operational parameters and material measurement information | Sanjeev Kaushal, Kenji Sugishima | 2015-02-10 |
| 8744607 | Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool | Sanjeev Kaushal, Kenji Sugishima | 2014-06-03 |
| 8723869 | Biologically based chamber matching | Sanjeev Kaushal, Kenji Sugishima, Robert Filman, Wolfgang Polak, Orion Wolfe +1 more | 2014-05-13 |
| 8725667 | Method and system for detection of tool performance degradation and mismatch | Sanjeev Kaushal, Kenji Sugishima | 2014-05-13 |
| 8396582 | Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool | Sanjeev Kaushal, Kenji Sugishima | 2013-03-12 |
| 8190543 | Autonomous biologically based learning tool | Sanjeev Kaushal, Kenji Sugishima | 2012-05-29 |
| 8078552 | Autonomous adaptive system and method for improving semiconductor manufacturing quality | Sanjeev Kaushal, Kenji Sugishima | 2011-12-13 |
| 7035696 | Method and apparatus for poly gate CD control | Ali Sadeghi, Mark Freeland, Ole Krogh | 2006-04-25 |
| 6834212 | Method and apparatus for APC solver engine and heuristic | Mark Freeland | 2004-12-21 |