Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7035696 | Method and apparatus for poly gate CD control | Ali Sadeghi, Sukesh Janubhai Patel, Mark Freeland | 2006-04-25 |
| 6821350 | Cleaning process residues on a process chamber component | — | 2004-11-23 |
| 5453125 | ECR plasma source for gas abatement | — | 1995-09-26 |
| 5451259 | ECR plasma source for remote processing | — | 1995-09-19 |
| 4960610 | Method of treating semiconductor wafers in a magnetically confined plasma at low pressure by monitoring peak to peak voltage of the plasma | — | 1990-10-02 |
| 4949670 | Method and apparatus for low pressure plasma | — | 1990-08-21 |