Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571900 | Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing | Sanjeev Kaushal, Sukesh Janubhai Patel, Wolfgang Polak, Aaron Archer Waterman | 2020-02-25 |
| 10228678 | Tool failure analysis using space-distorted similarity | Sanjeev Kaushal, Sukesh Janubhai Patel, Wolfgang Polak | 2019-03-12 |
| 9746849 | Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing | Sanjeev Kaushal, Sukesh Janubhai Patel, Wolfgang Polak, Aaron Archer Waterman | 2017-08-29 |
| 8723869 | Biologically based chamber matching | Sanjeev Kaushal, Kenji Sugishima, Sukesh Janubhai Patel, Robert Filman, Wolfgang Polak +1 more | 2014-05-13 |