Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5557105 | Pattern inspection apparatus and electron beam apparatus | Ichiro Honjo, Masaki Yamabe | 1996-09-17 |
| 5541023 | X-ray mask, method of manufacturing the x-ray mask and exposure method using the x-ray mask | Kazuaki Kondo | 1996-07-30 |
| 5430292 | Pattern inspection apparatus and electron beam apparatus | Ichiro Honjo, Masaki Yamabe | 1995-07-04 |
| 5384463 | Pattern inspection apparatus and electron beam apparatus | Ichiro Honjo, Masaki Yamabe | 1995-01-24 |
| 5126220 | Reticle for photolithographic patterning | Kazuo Tokitomo, Yasutaka Ban | 1992-06-30 |
| 4748646 | X-ray lithography system | Toshihiko Osada, Ichiro Honjo | 1988-05-31 |
| 4684315 | Frictionless supporting apparatus | Hiroshi Yasuda | 1987-08-04 |
| 4678919 | Electron beam exposure method and apparatus | Kenji Nakagawa | 1987-07-07 |
| 4377031 | Method of making Schottky barrier diode by selective beam-crystallized polycrystalline/amorphous layer | Hiroshi Goto | 1983-03-22 |
| 4352724 | Method of manufacturing a semiconductor device | Tadakazu Takada | 1982-10-05 |