Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418837 | Semiconductor device manufacturing method and substrate treatment system | Koji Akiyama, Chihiro TAMURA, Shintaro Aoyama, Yu Wamura | 2016-08-16 |
| 8741786 | Fabrication method of semiconductor device | Koji Akiyama, Yoshitsugu Tanaka, Yasushi Akasaka, Koji Yamashita | 2014-06-03 |
| 8129775 | Semiconductor device and method of manufacturing the same | Koji Akiyama, Tetsushi Ozaki, Tetsuya Shibata | 2012-03-06 |