Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12349434 | Manufacturing method for semiconductor device | Koji Akiyama, Philippe Gaubert | 2025-07-01 |
| 10008564 | Method of corner rounding and trimming of nanowires by microwave plasma | Kandabara Tapily, Ying Trickett, Cory Wajda, Gerrit J. Leusink, Kaoru Maekawa | 2018-06-26 |
| 9418837 | Semiconductor device manufacturing method and substrate treatment system | Koji Akiyama, Hirokazu Higashijima, Shintaro Aoyama, Yu Wamura | 2016-08-16 |