Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6837966 | Method and apparatus for an improved baffle plate in a plasma processing system | Shinya Nishimoto, Hiroyuki Nakayama | 2005-01-04 |
| 6798519 | Method and apparatus for an improved optical window deposition shield in a plasma processing system | Shinya Nishimoto, Hidehito Saigusa, Taira Takase, Hiroyuki Nakayama | 2004-09-28 |
| 6790289 | Method of cleaning a plasma processing apparatus | Taira Takase, Nobuyuki Nagayama, Hiroyuki Nakayama | 2004-09-14 |
| 6783863 | Plasma processing container internal member and production method thereof | Yoshio Harada, Junichi Takeuchi, Tatsuya Hamaguchi, Nobuyuki Nagayama | 2004-08-31 |