Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10131986 | Method of forming metal film | Kenji Suzuki, Takanobu HOTTA, Koji Maekawa | 2018-11-20 |
| 10026616 | Method of reducing stress in metal film and metal film forming method | Kenji Suzuki, Takanobu HOTTA, Koji Maekawa | 2018-07-17 |
| 9938620 | Gas supply mechanism, gas supplying method, film forming apparatus and film forming method using the same | Masayuki Moroi, Hajime Yamanaka, Takanobu HOTTA | 2018-04-10 |
| 9536745 | Tungsten film forming method | Kensaku Narushima, Takanobu HOTTA, Tomohisa Maruyama | 2017-01-03 |
| 9536782 | Tungsten film forming method, semiconductor device manufacturing method, and storage medium | Takanobu HOTTA, Koji Maekawa | 2017-01-03 |
| 9472454 | Tungsten film forming method | Takanobu HOTTA | 2016-10-18 |
| 8168539 | Method for forming tungsten film at a surface of a processing target material, film-forming apparatus, storage medium and semiconductor device with a tungsten film | Masahito Sugiura, Yasutaka Mizoguchi | 2012-05-01 |
| 7718005 | Film forming equipment and film forming method | Tatsuya Handa | 2010-05-18 |
| 6625862 | Method of manufacturing a processing apparatus | Morio Kajiyama, Sakae Nakatsuka | 2003-09-30 |
| 6387445 | Tungsten layer forming method and laminate structure of tungsten layer | Yukio Koike | 2002-05-14 |